供应6.5寸单晶硅片

6.5寸单晶硅片技术参数
/类型:P
 side/尺寸:125*125±0.4mm
/直径:Φ165±0.4mm
/厚度: 200±10μm
/电阻率:1.0–3.0Ω?cm
/少子寿命≥15μs
 content/氧含量≤1×1018atoms/cm3
 content/碳含量≤5×1016atoms/cm3
/弯曲度:≤30μm
: ≤25μm
 pit/位错密度:≤1000/cm3
 orientation/表面、边缘晶向:±1.0
 defect/崩边:Length/长度≤0.4mm、Depth/深度≤0.8mm,每片不**过2个(no more than 2 per piece wafer),间隔Space≥30mm
/缺口:Length/长度≤1mm、Depth/深度≤0.3mm,每片≤1个(no more than 1 per piece wafer)
15.晶片无裂纹、孔洞和明显刀痕及凹坑 
No crack, hole, obvious sawmarks and concave.